4:50 PM - 5:05 PM
△ [7p-C19-8] Electrical Properties of Fine Patterns Fabricated by the Electroless Deposition Process
〇Atsushi Hieno1, Nakanishi tsutomu1, Tanaka yusuke1 (1.TOSHIBA)
Atsushi Hieno
Speaker, Author, Co-Author
Thu. Sep 7, 2017 1:45 PM - 5:25 PM C19 (C19)
- Symposium (Oral)
- | Symposium
- | Challenges for 'multi-scale' processing - dry, wet, or else?...