Taku Iwase

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:15 PM - 2:45 PM A402 (402+403)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[7p-A402-1~6] 8.4 Plasma etching

1:15 PM - 1:30 PM

△ [7p-A402-1] Surface composition analysis of SiN/SiO₂ deep holes fabricated by plasma etching

〇Taku Iwase¹, Kazuhiro Karahashi², Satoshi Hamaguchi² (1.Hitachi R&D, 2.Osaka Univ.)