Shinya Aikawa

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:45 PM - 7:30 PM C23 (C23)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[7p-C23-1~22] 6.4 Thin films and New materials

2:15 PM - 2:30 PM

[7p-C23-3] Amorphous InSiO TFTs with a sharp subthreshold slope using ALD-AlO_x gate insulator

〇Shinya Aikawa^1,2, Takio Kizu², Toshihide Nabatame², Kazuhito Tsukagoshi² (1.Kogakuin Univ., 2.NIMS)