Atsushi Okuyama

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:45 PM - 5:25 PM C19 (C19)

Symposium (Oral)
| Symposium
| Challenges for 'multi-scale' processing - dry, wet, or else?...

[7p-C19-1~10] Challenges for 'multi-scale' processing - dry, wet, or else?...

3:20 PM - 3:35 PM

[7p-C19-5] Impact of electrostatic effects on wet etching phenomenon in nanoscale region

〇Atsushi Okuyama¹, Suguru Saito¹, Yoshiya Hagimoto¹, Hayato Iwamoto¹, Kenji Nishi², Ayuta Suzuki³, Takayuki Toshima² (1.Sony Semiconductor Solutions, 2.Tokyo Electron Kyushu, 3.Tokyo Electron)

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