Kaoru Fujihara

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 1:15 PM - 4:00 PM A411 (411)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[8p-A411-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

2:15 PM - 2:30 PM

[8p-A411-5] Analysis method of nano-particles on a silicon wafer surface

〇Kaoru Fujihara¹, Kazuya Doabshi¹, Misako Saito¹, Satoshi Onodera², Yoshikazu Furusawa² (1.Tokyo Electron, 2.Tokyo Electron Tohoku)