Takeshi Senda

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PB6 (P)

Poster presentation
| 15 Crystal Engineering
| 15.7 Crystal evaluation, impurities and crystal defects

[7p-PB6-1~10] 15.7 Crystal evaluation, impurities and crystal defects

1:30 PM - 3:30 PM

[7p-PB6-5] Atomic structures of grown-in Si-P precipitates in red-phosphorus heavily doped CZ-Si crystals

〇Takeshi Senda¹, Takashi Ishikawa¹, Hiroyuki Fujimori¹, Hisashi Matsumura¹, Shingo Narimatsu¹, Yoshiaki Abe¹, Tomoyuki Horikawa¹ (1.GlobalWafers Japan)

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