Tatsuya Koga

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 1:30 PM - 3:30 PM PA2 (P)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8p-PA2-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

△ [8p-PA2-16] Inclining Angle Sensitivity Characteristics of MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology

〇Tatsuya Koga^1,3, Ippei Tsuji^1,3, Motohiro Takayasu^1,3, Hiroyuki Ito^1,3, Daisuke Yamane^1,3, Shiro Dosho^1,3, Toshifumi Konishi^1,2,3, Noboru Ishihara^1,3, Katsuyuki Machida^1,3, Kazuya Masu^1,3 (1.Tokyo Tech, 2.NTT-AT, 3.JST-CREST)

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