The 78th JSAP Autumn Meeting, 2017

Satoshi Ichimaru

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 9:00 AM - 12:00 PM S44 (Conf. Room 5)

  • Oral presentation
  • | CS Code-sharing session
  • | 【CS.9】7.1 & 7.4 Code-sharing session

[5a-S44-1~11] 【CS.9】7.1 & 7.4 Code-sharing session

10:45 AM - 11:00 AM

[5a-S44-7] Ablation of EUV Multilayers Using Femto-Second Extreme Ultra-Violet Pulses

〇Satoshi Ichimaru1, Masaharu Nishikino2, Masahiko Ishino2, Hiroo Kinoshita3, Yuichi Inubushi4, Takeshi Higashiguchi5, Masakazu Washio6, Kazuyuki Sakaue7, Shigeki Owada8, Tadashi Hatano9, Masatoshi Hatayama1, Tadayuki Ohchi1, Dinh-Thanh Hung2, Akira Kon4, Hiroyuki Hara5, Shun Yamauchi5, Takuto Ogura5, Natumi Shinozaki5, Yutaka Koshiba5, Takashi Takahashi6, Takehiro Nishidome6, Satoshi Oku1 (1.NTT-AT, 2.QST Kansai, 3.Univ. Hyogo, 4.JASRI, 5.Utsunomiya Univ., 6.RISE, Waseda Univ., 7.WIAS, Waseda Univ., 8.RIKEN, 9.IMRAM Tohoku Univ.)