Naho Itagaki

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 1:45 PM - 5:45 PM C17 (Training Room 2)

Oral presentation
| 21 Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[6p-C17-1~15] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:00 PM - 4:15 PM

[6p-C17-9] Fabrication of High-Mobility Nanocrystal-Free a-In₂O₃:Sn Films by Magnetron Sputtering with Impurity-Mediated Amorphization Method

〇Naho Itagaki¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Kazunori Koga¹, Masaharu Shiratani¹ (1.Kyushu Univ.)