Yoshiro Kumagai

→ Search for Yoshiro Kumagai in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 8, 2017 1:30 PM - 3:30 PM PA2 (P)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8p-PA2-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

[8p-PA2-3] Reactive ion etching of CaF₂ / Si heterostructure using CF₄ / O₂ plasma

〇Yoshiro Kumagai¹, Masahiro Watanabe¹ (1.Tokyo Tech.)