Yutarou Nakamura

→ Search for Yutarou Nakamura in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PA3 (P)

Poster presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[7p-PA3-1~8] 8.1 Plasma production and control

1:30 PM - 3:30 PM

[7p-PA3-2] Design of rotary-typed magnetron sputtering device for effective utilization of thin film material target

〇Yutarou Nakamura¹, Yasunori Ohtsu¹ (1.Saga Univ.)