Daichi Yamada

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:30 AM - 11:30 AM PA9 (P)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[6a-PA9-1~11] 13.3 Insulator technology

9:30 AM - 11:30 AM

[6a-PA9-2] Effects of oxygen radical irradiation on the interface property of Al₂O₃/p-Ge grown by Atomic Layer Deposition

〇Daichi Yamada¹, Yohei Otani¹, Chiaya Yamamoto², Junji Yamanaka², Tetsuya Sato², Hiroshi Okamoto³, Yukio Fukuda¹ (1.Tokyo Univ. of sci.,Suwa, 2.Univ. of Yamanashi, 3.Hirosaki Univ.)