Session information

Poster presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[6a-PA7-1~2] 7.3 Micro/Nano patterning and fabrication

Wed. Sep 6, 2017 9:30 AM - 11:30 AM PA7 (P)

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9:30 AM - 11:30 AM

△ [6a-PA7-1] Thermal nanoimprinting of periodic nanostructure on atomic stepped polymer subsrate using a self-assembly formed mold

〇Taichiro Kinoshita¹, Ken Iwasa¹, Satoru Kaneko^2,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Inst. of Tech. Materials, 2.KISTECH)

9:30 AM - 11:30 AM

△ [6a-PA7-2] Fabrication of periodic nanostructure of conductive thin films on atomically stepped flexible substrate by thermal nanoimprint technique.

〇Shiori Yamada¹, Risa Goto¹, Taichiro Kinoshita¹, Katsuyoshi Komatsu², Tomoyasu Taniyama², Satoru Kaneko^3,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech. Materials, 2.Tokyo Tech. LMS, 3.KISTEC)

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