[5a-A204-1~11] 16.3 Bulk, thin-film and other silicon-based solar cells

[5a-A204-11] [JSAP Young Scientist Award Speech] Influence of substrate temperature on the properties of i-a-Si:H passivation layer deposited by facing target sputtering

〇Yuta Shiratori¹, Akira Faris¹, Kazuyoshi Nakada¹, Shinsuke Miyajima¹ (1.Tokyo Tech.)

Keywords:crystalline Si solar cell, passivation layer