9:15 AM - 9:30 AM
[5a-A204-2] Large Diameter-ratio LCZ Silicon Crystal Growth Using Liquinert Crucibles
Keywords:silicon, liquinert crucible, large diameter-ratio
In this study, we have succeeded in growing large diameter-ratio silicon, using LCZ growth technique (LCZ: Liquinert-crucible applied CZ). The ratio is defined as the diameter-ratio of growing crystal to crucible. We report that it is possible to grow silicon with the ratio of 0.73, comparing the conventional CZ growth technique with the ratio of 0.33 to 0.50. The larger diameter-ratio LCZ silicon has less segregation of oxygen than conventional CZ silicon.