[5a-A413-1~10] 8.2 Plasma measurements and diagnostics

[5a-A413-4] Surface Material Dependence of Radially Resolved Oxygen Dissociation Degree and Local Mean Electron Energy in Oxygen Plasma

〇Takayoshi Tsutsumi¹, Andrew Gibson², Deborah O'Connell², Timo Gans², Masaru Hori¹ (1.Nagoya Univ., 2.Univ. of York)

Keywords:plasma, electron energy, dissociation degree