[5a-A413-1~10] 8.2 Plasma measurements and diagnostics

△ [5a-A413-6] Two-dimensional spectroscopic observation in Ar+H₂ induction thermal plasmas

〇Yosuke Ishisaka¹, Naoto Kodama¹, Kotaro Shimizu¹, Kazuki Onda¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Tatsuo Ishijima¹, Shiori Sueyasu², Shu Watanabe², Keitaro Nakamura² (1.Kanazawa Univ., 2.Nisshin Seifun Group)

Keywords:Induction thermal plasmas, 2-dimensional optical emission spectroscopy

In materials processing using induction thermal plasmas (ICTP), investigating properties of ICTP is essential to improve the processing efficiency. This report describe the fundamental optical spectroscopic investigation of Ar+H2 ICTP by two-dimensional optical emission spectroscopy (2D-OES). Observed spatial distributions of Ar I and Ha line in the Ar+H2 ICTP torch have different features.