The 78th JSAP Autumn Meeting, 2017

Presentation information

Oral presentation

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[5a-A413-1~10] 8.2 Plasma measurements and diagnostics

Tue. Sep 5, 2017 9:15 AM - 11:45 AM A413 (413)

Koichi Sasaki(Hokkaido Univ.)

10:30 AM - 10:45 AM

[5a-A413-6] Two-dimensional spectroscopic observation in Ar+H2 induction thermal plasmas

Yosuke Ishisaka1, Naoto Kodama1, Kotaro Shimizu1, Kazuki Onda1, Yasunori Tanaka1, Yoshihiko Uesugi1, Tatsuo Ishijima1, Shiori Sueyasu2, Shu Watanabe2, Keitaro Nakamura2 (1.Kanazawa Univ., 2.Nisshin Seifun Group)

Keywords:Induction thermal plasmas, 2-dimensional optical emission spectroscopy

In materials processing using induction thermal plasmas (ICTP), investigating properties of ICTP is essential to improve the processing efficiency. This report describe the fundamental optical spectroscopic investigation of Ar+H2 ICTP by two-dimensional optical emission spectroscopy (2D-OES). Observed spatial distributions of Ar I and Ha line in the Ar+H2 ICTP torch have different features.