11:00 〜 11:15
▲ [5a-A413-8] Laser diagnostics of properties of atmospheric pressure plasmas
キーワード：plasma diagnostics, Thomson scattering
Low temperature plasma technologies play an important role for supplying a variety of chemically reactive species on film deposition, surface treatment, as well as medical applications. The reactive species generated by plasmas affects to both film properties and treatment efficiency in batch operations. To understand the mechanism on plasma-surface interaction, we have studied plasma properties in details of an atmospheric pressure argon plasma with a frequency of 60 Hz by using a laser Thomson scattering method, etc.
A triple grating system and a Nd:YAG laser (a wavelength of 532 nm) were used in this study. To analyze the Thomson scattering, Raman scattering due to inelastic scattering of O2 and N2 was subtracted by spectral simulations assuming a rotational temperature (Tg) of these gases.1) The fitted Thomson signal estimated electron density (ne) and temperature (Te). (Fig. 1)
When flow rates of Ar and applied voltages (Va) were changed, electron density, ne changed up to 1021 m-3 with Te of approximately 2 eV at 2 L/min Ar discharge. (Fig. 2) The Tg increased in proportion of a discharge power linked with the Va. The Te tended to decrease as function of the Va. This is considered to lower in rate for ionizations as results show that the increasing of ne led to stable discharge with high ionization efficiency.
The obtained data are useful in the application of atmospheric pressure plasmas.
A triple grating system and a Nd:YAG laser (a wavelength of 532 nm) were used in this study. To analyze the Thomson scattering, Raman scattering due to inelastic scattering of O2 and N2 was subtracted by spectral simulations assuming a rotational temperature (Tg) of these gases.1) The fitted Thomson signal estimated electron density (ne) and temperature (Te). (Fig. 1)
When flow rates of Ar and applied voltages (Va) were changed, electron density, ne changed up to 1021 m-3 with Te of approximately 2 eV at 2 L/min Ar discharge. (Fig. 2) The Tg increased in proportion of a discharge power linked with the Va. The Te tended to decrease as function of the Va. This is considered to lower in rate for ionizations as results show that the increasing of ne led to stable discharge with high ionization efficiency.
The obtained data are useful in the application of atmospheric pressure plasmas.