[5a-A414-1~9] 3.8 Optical measurement, instrumentation, and sensor

[5a-A414-8] Interference order discrimination method in single-shot two-dimensional tomography using optical frequency comb interference generated by VIPA

〇Futoshi Kokubun¹, Tatsutoshi Shioda¹ (1.Saitama Univ.)

Keywords:VIPA, Interference order, single-shot

High-speed dimensional noncontact shape measurement technology is very important in industry and medical field. Particularly, the shape measurement method based on low coherence interference is known as imaging with high resolution in the depth direction. We also developed a measurement method using VIPA as a frequency domain tomographic measurement method. However, in these methods, it is necessary to discriminate interference order in order to perform tomographic measurement. Therefore, in this study, the order of interference was judged by using the fact that the range projected on the CCD is different for each order of VIPA.