The 78th JSAP Autumn Meeting, 2017

Presentation information

Oral presentation

13 Semiconductors » 13.8 Compound and power electron devices and process technology

[5a-C17-1~10] 13.8 Compound and power electron devices and process technology

Tue. Sep 5, 2017 9:30 AM - 12:15 PM C17 (Training Room 2)

Takayoshi Oshima(Saga Univ.)

9:45 AM - 10:00 AM

[5a-C17-2] Electrical characteristics of Ga2O3 Schottky barrier diode with a TiN electrode

Takashi Kaneko1, Iriya Muneta1, Takuya Hoshii1, Hitoshi Wakabayashi1, Kazuo Tsutsui2, Hiroshi Iwai2, Kuniyuki Kakushima1 (1.Tokyo Tech., 2.Tokyo Tech. IIR)

Keywords:Ga2O3, Gallium oxide, Schottky barrier diode