[5a-S44-1~11] 【CS.9】7.1 & 7.4 Code-sharing session

[5a-S44-10] Modeling of article emission from the target of EUV source through laser ablation

〇Akira Sasaki¹, Atsushi Sunahara², Katsunobu Nishihara³, Takeshi Nishikawa⁴ (1.QST, 2.Purdue univ., 3.ILE, Osaka univ., 4.Okayama univ.)

Keywords:hydrodynamics simulation, laser ablation, equation of state

We present simulation studies of the optimization of the density profile of the plasma and the suppresion of the debris emission for the development of the laser produced plasma (LPP) EUV source for next generation microlithography. We apply algorithms for reorganization of the mesh of the Lagrangian hydrodynamics code to analyze the particle emission from the laser ablated tin target through liquid-to-gas transition.