[5p-PA1-1~82] 17 Nanocarbon Technology（Poster）

[5p-PA1-57] Adhesion improvement of multi-layer graphene grown by solid phase reaction with TiN layer

〇(M1C)Kosuke Yokosawa¹, Ueno Kazuyoshi^1,2 (1.Shibaura Inst. Tech, 2.SIT Res. Center for Green Innovation)

Keywords:multi-layer graphene, wiring, solid phase reaction