[5p-PA2-1~29] 12.1 Fabrications and Structure Controls

[5p-PA2-17] Ion-Assisted Deposition Polymerization of Acryl Polymer with Carboxy Group

〇(M1)Yuji Komuro¹, Kuniaki Tanaka¹, Hiroaki Usui¹ (1.Tokyo univ. Agri. & Tech)

Keywords:Acryl, ion assisted, deposition

Polymer films can be obtained by depositing acrylic monomer while irradiating ion beam on substrate surface. In this study, a polymer thin film was prepared from a monomer having a carboxyl group by ion assisted vapor deposition polymerization. In addition, infrared absorption and surface morphology of the prepared thin film were observed, and the film was evaluated.