[5p-S41-1~20] 7.2 Applications and technologies of electron beams

[5p-S41-10] On flare electrons causing positively electrification from the vicinity of electron beam irradiation to distant place

〇Shota Nishimura¹, Takuya Kawamoto¹, Masatoshi Kotera¹ (1.Osakakougyou Univ.)

Keywords:Scanning electron microscope

Scanning electron microscopes are indispensable in the field of science and technology as the observation, analysis and evaluation equipment, but when the conductivity of the sample is low, charging phenomenon occurs due to electron beam (EB) irradiation and stable observation and analysis are not done It becomes possible. We developed an electrostatic force microscope system as a technique to measure the surface potential to quantify the charging phenomenon of the sample, installed in the scanning electron microscope sample chamber, measured the potential distribution on the surface of the insulator sample after the EB irradiation.