3:00 PM - 3:15 PM
▼ [5p-S41-7] Dependence of channeling contrast on detection angle in SEMs
Keywords:channeling contrast, crystal information
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams
[5p-S41-1~20] 7.2 Applications and technologies of electron beams
Tue. Sep 5, 2017 1:15 PM - 6:45 PM S41 (Conf. Room 1)
Tadahiro Kawasaki(JFCC), Nobuhiro Ishikawa(NIMS), Shigekazu Nagai(Mie Univ.)