[5p-S44-1~10] 【CS.9】7.1 & 7.4 Code-sharing session

[5p-S44-2] Development of electron source using field electron emission

〇(M2)Ryota Michigami¹, Ken Oyama¹, Hideki Hmagaki², Kouji Kiyoyama¹, Msanori Ogino¹, Motoda Ryoiti³, Satoru Kosimuta³ (1.GSE-NiAS, 2.IIST-NiAS, 3.SciEnergy)

Keywords:Electron source, X-ray, Field electron emission

This research aims to develop a new type of electron source using the field electron emission. Field electron emission is a phenomenon of releasing electrons to the outside by applying a strong electric field to the conductor surface. A needle-shaped conductor is adopted as a structure for creating a strong electric field, and is formed using the large-scale integrated circuit manufacturing technology. It is expected to realize an surface-emission-type electron source which is compact, low cost, long lifetime and high-speed switching capability.