3:45 PM - 4:00 PM
[5p-S44-9] Pt atomic layer deposition for silicon X-ray micropore optics
Keywords:X-ray optics, atomic layer deposition, micropore optics
Oral presentation
CS Code-sharing session » 【CS.9】7.1 & 7.4 Code-sharing session
Tue. Sep 5, 2017 1:30 PM - 4:15 PM S44 (Conf. Room 5)
Mitsunori Toyoda(Tohoku Univ.)
3:45 PM - 4:00 PM
Keywords:X-ray optics, atomic layer deposition, micropore optics