12:00 PM - 12:15 PM
[6a-A503-12] CO concentration in CZ furnace
Keywords:silicon, CZ, carbon
Oral presentation
15 Crystal Engineering » 15.7 Crystal evaluation, impurities and crystal defects
Wed. Sep 6, 2017 9:00 AM - 12:30 PM A503 (503)
Yuta Nagai(GlobalWafers Japan), Shotaro Takeuchi(Ohsaka Univ.)
12:00 PM - 12:15 PM
Keywords:silicon, CZ, carbon