The 78th JSAP Autumn Meeting, 2017

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15 Crystal Engineering » 15.7 Crystal evaluation, impurities and crystal defects

[6a-A503-1~13] 15.7 Crystal evaluation, impurities and crystal defects

Wed. Sep 6, 2017 9:00 AM - 12:30 PM A503 (503)

Yuta Nagai(GlobalWafers Japan), Shotaro Takeuchi(Ohsaka Univ.)

11:00 AM - 11:15 AM

[6a-A503-8] A study on generation and annihilation of point defects during silicon crystals from melt (2): Generation mechanism of interstitials

〇Takao Abe1, Toru Takahashi1, Koun Shirai2 (1.ShinEtsu Handotai, 2.ISIR Osaka Univ.)

Keywords:point defects