[6a-PA6-1~3] 7.2 Applications and technologies of electron beams

[6a-PA6-1] Development of gas environmental heating TEM specimen holder

〇Hajime Akimoto^1,2, Masaki Takeguchi^2,1, Takashi Sekiguchi^2,1, Ayako Hashimoto^2,1 (1.Tsukuba Univ., 2.NIMS)

Keywords:transmission electron microscopy, in-situ observation

In recent years, the diversification of material development has increased the needs for nanostructural analysis in special environments such as liquid and gas atmosphere. From these backgrounds, we have developed a specimen holder system for a transmission electron microscope (TEM) that can create a gas environment in the vicinity of the specimen in a TEM and can simultaneously heat the specimen. By using this system, it is possible to observe the specimen under high temperature and gas atmosphere even in a general TEM.