The 78th JSAP Autumn Meeting, 2017

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Poster presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

[6a-PA8-1~4] 7.5 Ion beams

Wed. Sep 6, 2017 9:30 AM - 11:30 AM PA8 (P)

9:30 AM - 11:30 AM

[6a-PA8-2] Local structure analysis of Mg ion implanted Si

Yuki Kobayasih1, 〇Muneyuki Naito1, C Bachelet2, J Bourcois2 (1.Konan Univ., 2.CSNSM)

Keywords:Mg silicide, transmission electron microscopy