[6a-PB1-1~46] 11 超伝導（ポスター）

▲ [6a-PB1-42] Development of High-Q NbN Coplanar Waveguide Resonator on Si Substrate

〇Wei Qiu¹、Hirotaka Terai¹ (1.NICT)

キーワード：Superconducting thin film, NbN, CPWR