[6p-C14-1~19] 3.13 Semiconductor optical devices

[6p-C14-10] Deflection Characteristics of Slow-light SOA with MEMS Mirror

〇Toshihiro Asahi¹, Shunya Inoue¹, Xiaodong Gu¹, Masanori Nakahama¹, Fumio Koyama¹ (1.FIRST Tokyo Tech)

Keywords:MEMS beam scanner, Slow-light SOA

In recent years, with the progress of robots and automatic driving, attention has been drawn to LiDAR (Laser Imaging Detection and Ranging) which is a sensing technology that can measure the shape and distance of a target using short wavelength light.
In this research, we report on high resolution beam deflector introducing MEMS(Micro Electro Mechanical System) technology into slow-light SOA(Semiconductor Optical Amplifier), to realize high power and high resolution beam sweeping device indispensable for LiDAR system.