The 78th JSAP Autumn Meeting, 2017

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[6p-C23-1~16] 6.4 Thin films and New materials

Wed. Sep 6, 2017 1:45 PM - 6:15 PM C23 (C23)

Yoshinobu Nakamura(Univ. of Tokyo), Hiroaki Nishikawa(Kinki Univ.)

4:00 PM - 4:15 PM

△ [6p-C23-8] The origin of fixed charge for strontium silicate film on silicon substrate

〇(D)Shota Taniwaki1, Haruhiko Yoshida1, Koji Arafune1, Shin-ichi Satoh1, Yasushi Hotta1 (1.Univ. of Hyogo)

Keywords:strontium silicate, fixed charge, Annealing