[6p-PA2-1~7] 3.7 Laser processing

[6p-PA2-3] Shape control of micro-swelling structure on silicone rubber surface formed by vacuum UV laser

〇Ryota Matsunaga¹, Masayuki Okoshi¹ (1.National Defense Academy)

Keywords:ArF excimer laser, Al thin film, micro-swelling structure

Single layer of silica glass microspheres 2.5 micron in diameter was formed on a 10-nm-thick Al thin film/2-mm-thick silicone rubber, then a 193 nm ArF excimer laser irradiated the sample surface at the single-pulse fluence of 10 mJ/cm², the pulse repetition rate of 1 Hz and the shot number of 1 to 3600. As a result, the pillar-shaped micro-swelling structures of approximately 1 micron in diameter and 1 to 1.3 micron in height were successfully formed, compared to the truncated cone-shaped micro-swelling structure obtained when the Al thin film was not used during laser irradiation.