[6p-PA2-1~7] 3.7 Laser processing

[6p-PA2-4] Burst Laser Drilling of Metal in Supercritical CO2

〇Yuki Kitahara¹, Yuto Okada¹, Keisuke Yoshiki¹, Anna Ito², Miyuki Takamido², Hiromasa Furuta² (1.Univ of Hyogo, 2.Panasonic Industrial Devices SUNX Co., Ltd)

Keywords:laser machining, supercritical fluid

Using scCO2 as fluid atmosphere, laser drilling of high aspect ratio holes can be achieved because scCO2 can cause convection in tiny space such as drilling holes and wash moved chips away.However, convection can interfere focusing of laser and cause failure of machining.0We confirmed burst laser irradiation effective to control convection, and succeeded to drill 1.5 times deeper hole than conventional laser drilling in air atmosphere by using burst laser irradiation in CO2 atmosphere.