[6p-PA2-1~7] 3.7 Laser processing

[6p-PA2-6] Evaluation of Heat Affect Induced by Femtosecond Laser Scribing

〇Aiko Narazaki¹, Tadatake Sato¹, Hiroyuki Niino¹, Hideyuki Takada¹, Kenji Torizuka¹, Jiro Nishinaga¹, Yukiko Kamikawa¹, Shogo Ishizuka¹, Hajime Shibata¹, Shigeru Niki¹ (1.AIST)

Keywords:Femtosecond laser scribing, CIGS thin-film solar cells, Heat affect

In order to introduce all-laser scribing technology to CIGS thin-film solar cell industry, we have developed new technologies to reduce and recover thermal damage during laser processing. In this report, the heat affect induced by femtosecond laser pulse irradiation was evaluated by scanning spreading resistance microscopy (SSRM) measurements of a cross section of scribed trench fabricated by femtosecond laser lift-off of TCO.