[6p-PA5-1~24] 13.10 Compound solar cells

[6p-PA5-23] Study of wafer cleaning and regrowth for the epitaxial lifted-off substrates

〇Naoya Miyashita¹, Shuhei Yagi², Kentaroh Watanabe¹, Daiki Kimura³, Hassanet Sodabanlu¹, Tatsuya Nakata³, Masakazu Sugiyama^1,3, Yoshitaka Okada^1,3 (1.RCAST, Univ. Tokyo, 2.Saitama Univ., 3.Sch. Eng., Univ. Tokyo)

Keywords:III-V semiconductor, epitaxial lift-off

It is expected to reduce the production cost of the high efficiency III-V solar cells. We aim for developing the reuse method of the substrates after separating the device layers through the epitaxial lift-off (ELO) technology. In this work, surface analyses and cleaning process for the ELO-processed substrates are studied. Regrowth experiments on the processed substrates and investigation of the crystalline qualities will also be presented.