[6p-PA6-1~6] 15.2 II-VI and related compounds

[6p-PA6-3] Numerical Modeling of ZnS and ZnSe growth by CVD method

〇Masaya Iizuka¹, Yuji Mukaiyama¹, Bogdanov M.V.², Bord O.V.² (1.STR Japan K.K., 2.STR Group, Inc. - Soft-Impact, Ltd.)

Keywords:II-VI crystal growth, Bulk crystal Growth, simulation

In this study, we studied with regard to the flatness of the bulk crystal growth of ZnS by CVD method using developed simulation software Virutual Reactor CVD II-VI Edition. We could find a flat crystal growth condition by optimizing the argon flow recipe.