[6p-PA7-1~16] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

[6p-PA7-14] Crystalline quality of low-temperature-grown In_xGa_1-xAs on InP substrate

〇Yoriko Tominaga¹, Shingo Hirose¹, Yutaka Kadoya¹, Hitoshi Morioka², Noriaki Ikenaga³, Osamu Ueda³ (1.AdSM, Hiroshima Univ., 2.Bruker AXS K.K., 3.Kanazawa Inst. Tech.)

Keywords:low-temperature growth