The 78th JSAP Autumn Meeting, 2017

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Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

[6p-S41-1~10] 7.5 Ion beams

Wed. Sep 6, 2017 1:30 PM - 4:15 PM S41 (Conf. Room 1)

Satoshi Abo(Osaka Univ.), Toshio Seki(Kyoto Univ.)

4:00 PM - 4:15 PM

△ [6p-S41-10] SIMS Measurement in Humid Condition with Pipe-Nozzle

〇(M2)Kenta Ishii1, Toshio Seki1, Takaaki Aoki2, Jiro Matsuo1 (1.Graduate School of Engineering, Kyoto Univ., 2.ACCMS, Kyoto Univ.)

Keywords:Secondary Ion Mass Spectrometry