The 78th JSAP Autumn Meeting, 2017

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Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

[6p-S41-1~10] 7.5 Ion beams

Wed. Sep 6, 2017 1:30 PM - 4:15 PM S41 (Conf. Room 1)

Satoshi Abo(Osaka Univ.), Toshio Seki(Kyoto Univ.)

2:30 PM - 2:45 PM

[6p-S41-5] Evaluation of sensitivity for oxygen by means of TOF-ERDA

Yuta Kajitori1, Momomi Oishi1, 〇Keisuke Yasuda1, Yoichi Haruyama1, Yoshinori Nakata2, Kohtaku Suzuki2 (1.Kyoto Pref. Univ., 2.WERC)

Keywords:TOF-ERDA, sensitivity, oxygen

Detection sensitivities for implanted oxygen in a silicon wafer were measured by means of TOF-ERDA. The detection limit of 3.1×1014 cm-2 was obtained in the case of the measurement with Cu beam of 12 MeV energy, and 3.3×1015 cm-2 in the case of the measurement with C beam of 8 MeV energy.