[7a-A503-1~12] 12.6 Nanobiotechnology

△ [7a-A503-10] Effect of annealing in an oxygen ambient on gas sensors using WO3 nanoparticles

〇(D)Jongyoon Park¹, Yuki Yamada², Hitoshi Tabata¹ (1.The University of Tokyo, 2.NTT Docomo R&D Center)

Keywords:Gas sensor, Metal oxide semiconductor

Metal oxide semiconductor nanoparticle based gas sensors are widely used for health care gas sensors, detecting the respiratory and cutaneous gases from human body. Despite of its common applications, annealing effect in high oxygen pressure is largely unknown. Here, the improved sensitivity to acetone is identified when the WO3 nanoparticle based gas sensors are annealed in oxygen ambient.