[7a-A503-1~12] 12.6 ナノバイオテクノロジー

△ [7a-A503-10] Effect of annealing in an oxygen ambient on gas sensors using WO3 nanoparticles

〇(D)朴 鐘潤¹、Yamada Yuki²、Tabata Hitoshi¹ (1.The University of Tokyo、2.NTT Docomo R&D Center)

キーワード：Gas sensor、Metal oxide semiconductor

Metal oxide semiconductor nanoparticle based gas sensors are widely used for health care gas sensors, detecting the respiratory and cutaneous gases from human body. Despite of its common applications, annealing effect in high oxygen pressure is largely unknown. Here, the improved sensitivity to acetone is identified when the WO3 nanoparticle based gas sensors are annealed in oxygen ambient.