[7a-C11-1~12] 17.1 Carbon nanotubes & other nanocarbon materials

[7a-C11-1] Low temperature growth of SWCNTs from Ru Catalyst by ACCVD method and Study of growth mechanism

〇Takayuki Fujii¹, Seigo Ogawa¹, Takuya Okada¹, Takahiro Saida¹, Shigeya Naritsuka¹, Takahiro Maruyama¹ (1.Meijo Univ.)

Keywords:Single-walled carbon nanotube, Chemical vapor deposition, Ru

Since single-walled carbon nanotubes (SWCNTs) have many excellent characteristics, they are expected to be applied to the electronics field.In our laboratory we have reported the growth of SWCNT using platinum group elements as catalysts and recently reported that SWCNT grows using relatively inexpensive Ru as a catalyst among platinum group elements .In this research, SWCNT growth at 450 ℃ was succeeded by optimizing growth conditions