[7a-C17-1~12] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

△ [7a-C17-5] Epitaxial growth of ZnO films on lattice-mismatched substrates via nitrogen mediated crystallization -Effects of N₂/O₂ co-added buffer layers

〇Jiahao Lyu¹, Kazuya Iwasaki¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1.Kyushu University)

Keywords:zinc oxide, sputtering