[7a-C23-1~10] 6.4 薄膜新材料

▲ [7a-C23-3] Preparation of rhodium oxide thin films by reactive sputtering and their electrochromic properties.

〇Chanyang Jeong¹、Yoshio Abe¹、Midori Kawamura¹、Kyung Ho Kim¹、Takayuki Kiba¹ (1.Kitami Inst.)

キーワード：Rhodium oxide thin flim, Electrochromic, Reactive Sputtering

Electrochromic (EC) materials change their optical transmittance (colored and bleached) reversibly on application of a low voltage. A typical EC device consists of an EC layer, an ion-conduction layer, and an ion-storage layer, all sandwiched between two transparent conducting electrodes. Platinum group metal oxides, such as iridium (Ir) oxide and specific rhodium (Rh) oxide, are considered to be promising EC materials because of their high chemical stability. However, studies on the EC properties of Rh oxide are very scarce. In this study, rhodium oxide thin films were deposited by reactive sputtering, and their structure and EC properties were evaluated.