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[7a-C23-5] Large gauge factor of Cr-Mn thin films in high temperature range
Keywords:Cr-Mn thin film, high temperature, strain sensor
The author investigated gauge factors of Cr-Mn thin films for strain sensors in high temperature range. It was found that the gauge factors of the films showed large values, which were larger than about 6 and about 12 in maximum in high temperature range from 250 to 500℃.