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[7a-C23-6] Preparation of manganese oxides thin films by reactive sputtering and their electrochromic properties
Keywords:manganese oxide thin film, reactive sputtering, electrochromic
The electrochromic (EC) phenomenon is a phenomenon in which a material shows a reversible color change due to electrochemical redox. Manganese oxide is an oxidation colored type EC material, but there are few reports.Therefore, in this study, the manganese oxide thin film was prepared by reactive sputtering, the substrate temperature was changed, and the film structure, composition and EC characteristics were investigated.